Virtual Prototyping of Semiconductor Processing Equipment

There are great expectations for modeling and virtual prototyping in the semiconductor equipment industry. We discuss key areas where modeling and analysis are being used and have met some of these expectations. We identify interdisciplinary analysis as a requisite for virtual prototyping that will continue to meet current and future expectations. Since semiconductor equipment represents a design microcosm, these ideas will also help achieve the full potential of computer aided design and virtual prototyping in many other industries as well.